Gate Dielectric Engineering with an Ultrathin Silicon-oxide Interfacial Dipole Layer for Low-Leakage Oxide-Semiconductor Memories
Authors
Fabia F. Athena
Jonathan Hartanto
Matthias Passlack
Jack C. Evans
Jimmy Qin
Didem Dede
Koustav Jana
Shuhan Liu
Tara Peña
Eric Pop
Greg Pitner
Iuliana P. Radu
Paul C. McIntyre
H. -S. Philip Wong
Abstract
We demonstrate a gate dielectric engineering approach leveraging an ultrathin, atomic layer deposited (ALD) silicon oxide interfacial layer (SiL) between the amorphous oxide semiconductor (AOS) channel and the high-k gate dielectric. SiL positively shifts the threshold voltage (V$_T$) of AOS transistors, providing at least four distinct $V_T$ levels with a maximum increase of 500 mV. It achieves stable $V_T$ control without significantly degrading critical device parameters such as mobility, on-state current, all while keeping the process temperature below 225 $^{\circ}$C and requiring no additional heat treatment to activate the dipole. Positive-bias temperature instability tests at 85 $^{\circ}$C indicate a significant reduction in negative $V_{T}$ shifts for SiL-integrated devices, highlighting enhanced reliability. Incorporating this SiL gate stack into two-transistor gain-cell (GC) memory maintains a more stable storage node voltage ($V_{SN}$) (reduces $V_{SN}$ drop by 67\%), by limiting unwanted charge losses. SiL-engineered GCs also reach retention times up to 10,000 s at room temperature and reduce standby leakage current by three orders of magnitude relative to baseline device, substantially lowering refresh energy consumption.
